Week 1: Wafer clean and oxidation
Week 2: Oxide measurement and Photomask #1
Week 3: Polysilicon deposition
Week 4: Polysilicon oxidation and annealing; Photomask #2
Week 5: Ion Implantation
Week 6: Implant activation and drive-in; isolation oxide; photomask #3
Week 7: Metal Deposition
Week 8: Photomask #4: Metal definition; Forming gas anneal
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November 13, 1995
