Ellipsometer Procedure and Data

Procedure

Align wafer stage
- Rough align with crosshairs
- Final align to maximize laser signal strength
Run ellipsometer program; one-angle, two-wavelength

Thickness in angstroms, measured at center of wafer:
Wafer	Wavelength 1	Wavelength 2	Average
1	8516	8543	8530
2	8629	8646	8638
3	8614	8633	8624
4	8282	8298	8290
5	8293	8312	8303
6	8346	8368	8357
		Total Average:	8457

Additional measurements of wafer #6:
Location Wavelength 1 Wavelength 2 Average

Top Edge 8369 8389 8379

Right Edge 8347 8375 8361

Additional measurements of wafer #6:
Location	Wavelength 1	Wavelength 2	Average
Top Edge	8369	8389	8379
Right Edge	8347	8375	8361

November 13, 1995